Hydrogen gettering in annealed oxygen-implanted silicon
Saved in:
| Date: | 2010 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2010
|
| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349239 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-100068 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1000682024-04-17T17:54:58Z Hydrogen gettering in annealed oxygen-implanted silicon A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349239 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk Hydrogen gettering in annealed oxygen-implanted silicon |
| format |
Article |
| author |
A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk |
| author_facet |
A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk |
| author_sort |
A. Misiuk |
| title |
Hydrogen gettering in annealed oxygen-implanted silicon |
| title_short |
Hydrogen gettering in annealed oxygen-implanted silicon |
| title_full |
Hydrogen gettering in annealed oxygen-implanted silicon |
| title_fullStr |
Hydrogen gettering in annealed oxygen-implanted silicon |
| title_full_unstemmed |
Hydrogen gettering in annealed oxygen-implanted silicon |
| title_sort |
hydrogen gettering in annealed oxygen-implanted silicon |
| publishDate |
2010 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349239 |
| work_keys_str_mv |
AT amisiuk hydrogengetteringinannealedoxygenimplantedsilicon AT abarcz hydrogengetteringinannealedoxygenimplantedsilicon AT aulyashin hydrogengetteringinannealedoxygenimplantedsilicon AT ivantonova hydrogengetteringinannealedoxygenimplantedsilicon AT mprujszczyk hydrogengetteringinannealedoxygenimplantedsilicon |
| first_indexed |
2025-07-22T15:14:58Z |
| last_indexed |
2025-07-22T15:14:58Z |
| _version_ |
1838360980890845184 |