Complex destruction of near-surface silicon layers of Si-SiO2 structure

Complex destruction of near-surface silicon layers of Si-SiO2 structure

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Бібліографічні деталі
Дата:2010
Автори: I. R. Yatsunskiy, O. A. Kulinich
Формат: Стаття
Мова:English
Опубліковано: 2010
Назва видання:Semiconductor Physics, Quantum Electronics and Optoelectronics
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000349387
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-1001162024-04-17T17:55:31Z Complex destruction of near-surface silicon layers of Si-SiO2 structure I. R. Yatsunskiy O. A. Kulinich 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349387 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
I. R. Yatsunskiy
O. A. Kulinich
Complex destruction of near-surface silicon layers of Si-SiO2 structure
format Article
author I. R. Yatsunskiy
O. A. Kulinich
author_facet I. R. Yatsunskiy
O. A. Kulinich
author_sort I. R. Yatsunskiy
title Complex destruction of near-surface silicon layers of Si-SiO2 structure
title_short Complex destruction of near-surface silicon layers of Si-SiO2 structure
title_full Complex destruction of near-surface silicon layers of Si-SiO2 structure
title_fullStr Complex destruction of near-surface silicon layers of Si-SiO2 structure
title_full_unstemmed Complex destruction of near-surface silicon layers of Si-SiO2 structure
title_sort complex destruction of near-surface silicon layers of si-sio2 structure
publishDate 2010
url http://jnas.nbuv.gov.ua/article/UJRN-0000349387
work_keys_str_mv AT iryatsunskiy complexdestructionofnearsurfacesiliconlayersofsisio2structure
AT oakulinich complexdestructionofnearsurfacesiliconlayersofsisio2structure
first_indexed 2024-04-18T05:40:51Z
last_indexed 2024-04-18T05:40:51Z
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