APA (7th ed.) Citation

Semenova, S. E., & Semenov, E. I. (2006). Photometric monitoring of etching rate of thin dielectric films.

Chicago Style (17th ed.) Citation

Semenova, S. E., and E. I. Semenov. Photometric Monitoring of Etching Rate of Thin Dielectric Films. 2006.

MLA (8th ed.) Citation

Semenova, S. E., and E. I. Semenov. Photometric Monitoring of Etching Rate of Thin Dielectric Films. 2006.

Warning: These citations may not always be 100% accurate.