Semenova, S. E., & Semenov, E. I. (2006). Photometric monitoring of etching rate of thin dielectric films.
Chicago Style (17th ed.) CitationSemenova, S. E., and E. I. Semenov. Photometric Monitoring of Etching Rate of Thin Dielectric Films. 2006.
MLA (8th ed.) CitationSemenova, S. E., and E. I. Semenov. Photometric Monitoring of Etching Rate of Thin Dielectric Films. 2006.
Warning: These citations may not always be 100% accurate.