Farenik, V. I. (2004). High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching.
Chicago-Zitierstil (17. Ausg.)Farenik, V. I. High-frequency Discharges of Low Pressure in Vacuum-plasma Technology of Low Power-consuming for Microstructure Etching. 2004.
MLA-Zitierstil (8. Ausg.)Farenik, V. I. High-frequency Discharges of Low Pressure in Vacuum-plasma Technology of Low Power-consuming for Microstructure Etching. 2004.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.