Farenik, V. I. (2004). High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching.
Chicago Style (17th ed.) CitationFarenik, V. I. High-frequency Discharges of Low Pressure in Vacuum-plasma Technology of Low Power-consuming for Microstructure Etching. 2004.
MLA (8th ed.) CitationFarenik, V. I. High-frequency Discharges of Low Pressure in Vacuum-plasma Technology of Low Power-consuming for Microstructure Etching. 2004.
Warning: These citations may not always be 100% accurate.