The investigation of RF discharge in the procession-plasma method by coating films

The investigation of RF discharge in the procession-plasma method by coating films

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Bibliographic Details
Date:	2003
Main Authors:	V. I. Gritsenko, V. M. Beresnev, O. M. Shvets
Format:	Article
Language:	English
Published:	2003
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000849880
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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