Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge

Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge

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Bibliographic Details
Date:2006
Main Authors: V. M. Beresnev, V. T. Tolok, O. M. Shvets, E. V. Fursova, N. N. Chernyshov, L. V. Malikov
Format: Article
Language:English
Published: 2006
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000855338
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-106838
record_format dspace
spelling open-sciencenbuvgovua-1068382024-04-17T19:10:02Z Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge V. M. Beresnev V. T. Tolok O. M. Shvets E. V. Fursova N. N. Chernyshov L. V. Malikov 1999-8074 2006 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000855338 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. M. Beresnev
V. T. Tolok
O. M. Shvets
E. V. Fursova
N. N. Chernyshov
L. V. Malikov
Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge
format Article
author V. M. Beresnev
V. T. Tolok
O. M. Shvets
E. V. Fursova
N. N. Chernyshov
L. V. Malikov
author_facet V. M. Beresnev
V. T. Tolok
O. M. Shvets
E. V. Fursova
N. N. Chernyshov
L. V. Malikov
author_sort V. M. Beresnev
title Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge
title_short Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge
title_full Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge
title_fullStr Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge
title_full_unstemmed Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge
title_sort micro-nanolayer coverings produced by the method vacuum-arc deposition from use the hf-discharge
publishDate 2006
url http://jnas.nbuv.gov.ua/article/UJRN-0000855338
work_keys_str_mv AT vmberesnev micronanolayercoveringsproducedbythemethodvacuumarcdepositionfromusethehfdischarge
AT vttolok micronanolayercoveringsproducedbythemethodvacuumarcdepositionfromusethehfdischarge
AT omshvets micronanolayercoveringsproducedbythemethodvacuumarcdepositionfromusethehfdischarge
AT evfursova micronanolayercoveringsproducedbythemethodvacuumarcdepositionfromusethehfdischarge
AT nnchernyshov micronanolayercoveringsproducedbythemethodvacuumarcdepositionfromusethehfdischarge
AT lvmalikov micronanolayercoveringsproducedbythemethodvacuumarcdepositionfromusethehfdischarge
first_indexed 2025-07-22T17:17:37Z
last_indexed 2025-07-22T17:17:37Z
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