Plasma potential influence on ion energy istribution function in icp source
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| Date: | 2007 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2007
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000858403 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-106923 |
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open-sciencenbuvgovua-1069232024-04-17T19:10:34Z Plasma potential influence on ion energy istribution function in icp source O. V. Vozniy G. Y. Yeom Yu. Kropotov 1999-8074 2007 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000858403 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering O. V. Vozniy G. Y. Yeom Yu. Kropotov Plasma potential influence on ion energy istribution function in icp source |
| format |
Article |
| author |
O. V. Vozniy G. Y. Yeom Yu. Kropotov |
| author_facet |
O. V. Vozniy G. Y. Yeom Yu. Kropotov |
| author_sort |
O. V. Vozniy |
| title |
Plasma potential influence on ion energy istribution function in icp source |
| title_short |
Plasma potential influence on ion energy istribution function in icp source |
| title_full |
Plasma potential influence on ion energy istribution function in icp source |
| title_fullStr |
Plasma potential influence on ion energy istribution function in icp source |
| title_full_unstemmed |
Plasma potential influence on ion energy istribution function in icp source |
| title_sort |
plasma potential influence on ion energy istribution function in icp source |
| publishDate |
2007 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000858403 |
| work_keys_str_mv |
AT ovvozniy plasmapotentialinfluenceonionenergyistributionfunctioninicpsource AT gyyeom plasmapotentialinfluenceonionenergyistributionfunctioninicpsource AT yukropotov plasmapotentialinfluenceonionenergyistributionfunctioninicpsource |
| first_indexed |
2024-04-18T06:08:30Z |
| last_indexed |
2024-04-18T06:08:30Z |
| _version_ |
1796888438541123584 |