Komarov, F. F., Milchanin, O. V., Mironov, A. M., & Kupchishin, A. I. (2008). The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation.
Chicago Style (17th ed.) CitationKomarov, F. F., O. V. Milchanin, A. M. Mironov, and A. I. Kupchishin. The Formation of Isolating and Gettering Layers in Semiconductors with Use of Medium Energy Proton Implantation. 2008.
MLA (8th ed.) CitationKomarov, F. F., et al. The Formation of Isolating and Gettering Layers in Semiconductors with Use of Medium Energy Proton Implantation. 2008.
Warning: These citations may not always be 100% accurate.