The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN
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| Date: | 2022 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2022
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001367365 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-18792023-09-12T18:00:36Z The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN D. V. Horokh O. V. Maksakova C. A. Klymenko S. V. Lytovchenko V. M. Beresniev O. V. Hlukhov 0203-3119 2022 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001367365 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials D. V. Horokh O. V. Maksakova C. A. Klymenko S. V. Lytovchenko V. M. Beresniev O. V. Hlukhov The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN |
| format |
Article |
| author |
D. V. Horokh O. V. Maksakova C. A. Klymenko S. V. Lytovchenko V. M. Beresniev O. V. Hlukhov |
| author_facet |
D. V. Horokh O. V. Maksakova C. A. Klymenko S. V. Lytovchenko V. M. Beresniev O. V. Hlukhov |
| author_sort |
D. V. Horokh |
| title |
The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN |
| title_short |
The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN |
| title_full |
The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN |
| title_fullStr |
The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN |
| title_full_unstemmed |
The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN |
| title_sort |
influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating tisin/nbn |
| publishDate |
2022 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001367365 |
| work_keys_str_mv |
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| first_indexed |
2025-07-17T10:35:55Z |
| last_indexed |
2025-07-17T10:35:55Z |
| _version_ |
1837890096675684352 |