Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
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| Datum: | 2017 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2017
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| Schriftenreihe: | Chemistry, physics and technology of surface |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000687484 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-357022024-02-29T11:28:26Z Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing O. O. Havryliuk Yu. Semchuk 2079-1704 2017 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0000687484 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Chemistry, physics and technology of surface |
| spellingShingle |
Chemistry, physics and technology of surface O. O. Havryliuk Yu. Semchuk Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| format |
Article |
| author |
O. O. Havryliuk Yu. Semchuk |
| author_facet |
O. O. Havryliuk Yu. Semchuk |
| author_sort |
O. O. Havryliuk |
| title |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_short |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_full |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_fullStr |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_full_unstemmed |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_sort |
theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| publishDate |
2017 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000687484 |
| work_keys_str_mv |
AT oohavryliuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing AT yusemchuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing |
| first_indexed |
2025-07-17T18:00:11Z |
| last_indexed |
2025-07-17T18:00:11Z |
| _version_ |
1837918456991711232 |