Filatov, J. D., Sidorko, V. I., Kovalev, S. V., Filatov, J., & Montej, G. (2017). In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing.
Chicago-Zitierstil (17. Ausg.)Filatov, Ju. D., V. I. Sidorko, S. V. Kovalev, Ju Filatov, und G. Montej. In-process Monitoring of Shape Accuracy of Flat Surfaces of Optical and Microelectronic Components in Polishing. 2017.
MLA-Zitierstil (8. Ausg.)Filatov, Ju. D., et al. In-process Monitoring of Shape Accuracy of Flat Surfaces of Optical and Microelectronic Components in Polishing. 2017.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.