APA (7th ed.) Citation

Filatov, J. D., Sidorko, V. I., Kovalev, S. V., Filatov, J., & Montej, G. (2017). In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing.

Chicago Style (17th ed.) Citation

Filatov, Ju. D., V. I. Sidorko, S. V. Kovalev, Ju Filatov, and G. Montej. In-process Monitoring of Shape Accuracy of Flat Surfaces of Optical and Microelectronic Components in Polishing. 2017.

MLA (8th ed.) Citation

Filatov, Ju. D., et al. In-process Monitoring of Shape Accuracy of Flat Surfaces of Optical and Microelectronic Components in Polishing. 2017.