Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures
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| Datum: | 2015 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
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2015
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| Schriftenreihe: | Ukrainian journal of physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000701174 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-654192024-04-16T13:17:58Z Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures A. A. Efremov V. G. Litovchenko V. P. Melnik O. S. Oberemok V. G. Popov B. M. Romanyuk 2071-0186 2015 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000701174 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics A. A. Efremov V. G. Litovchenko V. P. Melnik O. S. Oberemok V. G. Popov B. M. Romanyuk Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| format |
Article |
| author |
A. A. Efremov V. G. Litovchenko V. P. Melnik O. S. Oberemok V. G. Popov B. M. Romanyuk |
| author_facet |
A. A. Efremov V. G. Litovchenko V. P. Melnik O. S. Oberemok V. G. Popov B. M. Romanyuk |
| author_sort |
A. A. Efremov |
| title |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_short |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_full |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_fullStr |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_full_unstemmed |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_sort |
dopant depth profile modification during mass spectrometric analysis of multilayer nanostructures |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000701174 |
| work_keys_str_mv |
AT aaefremov dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT vglitovchenko dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT vpmelnik dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT osoberemok dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT vgpopov dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT bmromanyuk dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures |
| first_indexed |
2025-07-22T05:00:29Z |
| last_indexed |
2025-07-22T05:00:29Z |
| _version_ |
1838322575378219008 |