Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures
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| Datum: | 2015 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
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2015
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| Schriftenreihe: | Ukrainian Journal of Physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000732056 |
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open-sciencenbuvgovua-658412024-04-16T13:20:44Z Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures O. O. Yefremov V. H. Lytovchenko V. P. Melnyk O. S. Oberemok V. H. Popov B. M. Romaniuk 0372-400X 2015 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000732056 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian Journal of Physics |
| spellingShingle |
Ukrainian Journal of Physics O. O. Yefremov V. H. Lytovchenko V. P. Melnyk O. S. Oberemok V. H. Popov B. M. Romaniuk Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| format |
Article |
| author |
O. O. Yefremov V. H. Lytovchenko V. P. Melnyk O. S. Oberemok V. H. Popov B. M. Romaniuk |
| author_facet |
O. O. Yefremov V. H. Lytovchenko V. P. Melnyk O. S. Oberemok V. H. Popov B. M. Romaniuk |
| author_sort |
O. O. Yefremov |
| title |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_short |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_full |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_fullStr |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_full_unstemmed |
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures |
| title_sort |
dopant depth profile modification during mass spectrometric analysis of multilayer nanostructures |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000732056 |
| work_keys_str_mv |
AT ooyefremov dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT vhlytovchenko dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT vpmelnyk dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT osoberemok dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT vhpopov dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures AT bmromaniuk dopantdepthprofilemodificationduringmassspectrometricanalysisofmultilayernanostructures |
| first_indexed |
2025-07-22T05:09:32Z |
| last_indexed |
2025-07-22T05:09:32Z |
| _version_ |
1838323099331723264 |