Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures

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Bibliographic Details
Date:	2015
Main Authors:	O. O. Yefremov, V. H. Lytovchenko, V. P. Melnyk, O. S. Oberemok, V. H. Popov, B. M. Romaniuk
Format:	Article
Language:	English
Published:	2015
Series:	Ukrainian Journal of Physics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000732056
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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