Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics
Saved in:
| Date: | 2015 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2015
|
| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001059748 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-68412 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-684122024-04-16T13:34:04Z Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics Ju. E. Gordienko M. I. Pjatajkina A. V. Polishchuk 1999-8074 2015 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001059748 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering Ju. E. Gordienko M. I. Pjatajkina A. V. Polishchuk Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics |
| format |
Article |
| author |
Ju. E. Gordienko M. I. Pjatajkina A. V. Polishchuk |
| author_facet |
Ju. E. Gordienko M. I. Pjatajkina A. V. Polishchuk |
| author_sort |
Ju. E. Gordienko |
| title |
Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics |
| title_short |
Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics |
| title_full |
Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics |
| title_fullStr |
Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics |
| title_full_unstemmed |
Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics |
| title_sort |
microwave high-resolution scanning heating in the technology of micro- and nanoelectronics |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001059748 |
| work_keys_str_mv |
AT juegordienko microwavehighresolutionscanningheatinginthetechnologyofmicroandnanoelectronics AT mipjatajkina microwavehighresolutionscanningheatinginthetechnologyofmicroandnanoelectronics AT avpolishchuk microwavehighresolutionscanningheatinginthetechnologyofmicroandnanoelectronics |
| first_indexed |
2025-07-22T05:54:20Z |
| last_indexed |
2025-07-22T05:54:20Z |
| _version_ |
1838325713221976064 |