APA (7th ed.) Citation

Golishnikov, A. A., & Putrja, M. G. (2014). Development of deep silicon plasma etching for 3D integration technology.

Chicago Style (17th ed.) Citation

Golishnikov, A. A., and M. G. Putrja. Development of Deep Silicon Plasma Etching for 3D Integration Technology. 2014.

MLA (8th ed.) Citation

Golishnikov, A. A., and M. G. Putrja. Development of Deep Silicon Plasma Etching for 3D Integration Technology. 2014.

Warning: These citations may not always be 100% accurate.