Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics
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| Datum: | 2014 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2014
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| Schriftenreihe: | Nanosystems, nanomaterials, nanotechnologies |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000476016 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-753092024-04-16T17:26:05Z Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics V. V. Vaskevich V. E. Gajshun D. L. Kovalenko 1816-5230 2014 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000476016 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Nanosystems, nanomaterials, nanotechnologies |
| spellingShingle |
Nanosystems, nanomaterials, nanotechnologies V. V. Vaskevich V. E. Gajshun D. L. Kovalenko Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| format |
Article |
| author |
V. V. Vaskevich V. E. Gajshun D. L. Kovalenko |
| author_facet |
V. V. Vaskevich V. E. Gajshun D. L. Kovalenko |
| author_sort |
V. V. Vaskevich |
| title |
Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_short |
Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_full |
Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_fullStr |
Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_full_unstemmed |
Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_sort |
synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000476016 |
| work_keys_str_mv |
AT vvvaskevich synthesisandstudyofsilicatesolgelcoatingsformicroandnanoelectronics AT vegajshun synthesisandstudyofsilicatesolgelcoatingsformicroandnanoelectronics AT dlkovalenko synthesisandstudyofsilicatesolgelcoatingsformicroandnanoelectronics |
| first_indexed |
2025-07-22T07:40:54Z |
| last_indexed |
2025-07-22T07:40:54Z |
| _version_ |
1838332339690668032 |