APA (7th ed.) Citation

Vjunov, O. I., Kovalenko, L. L., Belous, A. G., Bohnke, O., & Bohnke, C. (2014). Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering.

Chicago Style (17th ed.) Citation

Vjunov, O. I., L. L. Kovalenko, A. G. Belous, O. Bohnke, and C. Bohnke. Fabrication of Nanosize LiPON Films by Means of High-frequency Magnetron Sputtering. 2014.

MLA (8th ed.) Citation

Vjunov, O. I., et al. Fabrication of Nanosize LiPON Films by Means of High-frequency Magnetron Sputtering. 2014.

Warning: These citations may not always be 100% accurate.