About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
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| Datum: | 2013 |
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| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2013
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| Schriftenreihe: | Optoelectronics and Semiconductor Technique |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000363128 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-842522024-04-16T18:37:13Z About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation Ya. M. Olikh 2707-6806 2013 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0000363128 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Optoelectronics and Semiconductor Technique |
| spellingShingle |
Optoelectronics and Semiconductor Technique Ya. M. Olikh About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation |
| format |
Article |
| author |
Ya. M. Olikh |
| author_facet |
Ya. M. Olikh |
| author_sort |
Ya. M. Olikh |
| title |
About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation |
| title_short |
About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation |
| title_full |
About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation |
| title_fullStr |
About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation |
| title_full_unstemmed |
About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation |
| title_sort |
about ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000363128 |
| work_keys_str_mv |
AT yamolikh aboutultrasoundstimulatedaselforganizationofdefectstructuresinsemiconductorsduringionimplantation |
| first_indexed |
2025-07-22T10:14:49Z |
| last_indexed |
2025-07-22T10:14:49Z |
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