Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching
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| Datum: | 2013 |
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| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2013
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| Schriftenreihe: | Technology and design in electronic equipment |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000405176 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-845322024-04-16T18:39:21Z Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching I. R. Jatsunskij 2225-5818 2013 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405176 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Technology and design in electronic equipment |
| spellingShingle |
Technology and design in electronic equipment I. R. Jatsunskij Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| format |
Article |
| author |
I. R. Jatsunskij |
| author_facet |
I. R. Jatsunskij |
| author_sort |
I. R. Jatsunskij |
| title |
Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_short |
Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_full |
Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_fullStr |
Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_full_unstemmed |
Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_sort |
obtaining porous silicon suitable for sensor technology using macetch nonelectrolytic etching |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000405176 |
| work_keys_str_mv |
AT irjatsunskij obtainingporoussiliconsuitableforsensortechnologyusingmacetchnonelectrolyticetching |
| first_indexed |
2025-07-22T10:20:32Z |
| last_indexed |
2025-07-22T10:20:32Z |
| _version_ |
1838342758490701824 |