APA (7th ed.) Citation

Havryliuk, O. O., & Semchuk, Y. (2013). Temperature and laser annealing of nonstoichiometric SiOx films.

Chicago Style (17th ed.) Citation

Havryliuk, O. O., and Yu Semchuk. Temperature and Laser Annealing of Nonstoichiometric SiOx Films. 2013.

MLA (8th ed.) Citation

Havryliuk, O. O., and Yu Semchuk. Temperature and Laser Annealing of Nonstoichiometric SiOx Films. 2013.

Warning: These citations may not always be 100% accurate.