Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films
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| Datum: | 2012 |
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| Format: | Artikel |
| Sprache: | English |
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2012
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000350279 |
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open-sciencenbuvgovua-907402024-04-17T16:37:35Z Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films Yu. Yu. Bacherikov N. S. Boltovets R. V. Konakova Yu. Kolyadina T. M. Lednova O. B. Okhrimenko 1560-8034 2012 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000350279 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics Yu. Yu. Bacherikov N. S. Boltovets R. V. Konakova Yu. Kolyadina T. M. Lednova O. B. Okhrimenko Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films |
| format |
Article |
| author |
Yu. Yu. Bacherikov N. S. Boltovets R. V. Konakova Yu. Kolyadina T. M. Lednova O. B. Okhrimenko |
| author_facet |
Yu. Yu. Bacherikov N. S. Boltovets R. V. Konakova Yu. Kolyadina T. M. Lednova O. B. Okhrimenko |
| author_sort |
Yu. Yu. Bacherikov |
| title |
Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films |
| title_short |
Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films |
| title_full |
Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films |
| title_fullStr |
Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films |
| title_full_unstemmed |
Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films |
| title_sort |
interface features of sio2/sic heterostructures according to methods for producing the sio2 thin films |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000350279 |
| work_keys_str_mv |
AT yuyubacherikov interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms AT nsboltovets interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms AT rvkonakova interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms AT yukolyadina interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms AT tmlednova interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms AT obokhrimenko interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms |
| first_indexed |
2025-07-22T12:19:48Z |
| last_indexed |
2025-07-22T12:19:48Z |
| _version_ |
1838350089458810880 |