Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
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| Datum: | 2012 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
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2012
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| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000696639 |
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open-sciencenbuvgovua-931552024-04-17T16:55:54Z Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov 0203-3119 2012 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000696639 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| format |
Article |
| author |
V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov |
| author_facet |
V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov |
| author_sort |
V. S. Sedov |
| title |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_short |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_full |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_fullStr |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_full_unstemmed |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_sort |
stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000696639 |
| work_keys_str_mv |
AT vssedov stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma AT vgralchenko stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma AT aakhomich stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma AT aisizov stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma AT tmzvukova stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma AT vikonov stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma |
| first_indexed |
2025-07-22T13:12:50Z |
| last_indexed |
2025-07-22T13:12:50Z |
| _version_ |
1838353254999654400 |