Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma

Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma

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Bibliographic Details
Date:2012
Main Authors: V. S. Sedov, V. G. Ralchenko, A. A. Khomich, A. I. Sizov, T. M. Zvukova, V. I. Konov
Format: Article
Language:English
Published: 2012
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000696639
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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-93155
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spelling open-sciencenbuvgovua-931552024-04-17T16:55:54Z Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov 0203-3119 2012 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000696639 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
V. S. Sedov
V. G. Ralchenko
A. A. Khomich
A. I. Sizov
T. M. Zvukova
V. I. Konov
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
format Article
author V. S. Sedov
V. G. Ralchenko
A. A. Khomich
A. I. Sizov
T. M. Zvukova
V. I. Konov
author_facet V. S. Sedov
V. G. Ralchenko
A. A. Khomich
A. I. Sizov
T. M. Zvukova
V. I. Konov
author_sort V. S. Sedov
title Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_short Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_full Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_fullStr Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_full_unstemmed Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_sort stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
publishDate 2012
url http://jnas.nbuv.gov.ua/article/UJRN-0000696639
work_keys_str_mv AT vssedov stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
AT vgralchenko stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
AT aakhomich stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
AT aisizov stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
AT tmzvukova stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
AT vikonov stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
first_indexed 2025-07-22T13:12:50Z
last_indexed 2025-07-22T13:12:50Z
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