Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
Saved in:
| Date: | 2012 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2012
|
| Series: | Ukrainian Journal of Physics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000724619 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |