Deposition of the stoichiometric coatings by reactive magnetron sputtering
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| Date: | 2012 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2012
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000906899 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-94120 |
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open-sciencenbuvgovua-941202024-04-17T17:04:15Z Deposition of the stoichiometric coatings by reactive magnetron sputtering A. Sagalovych S. Dudnik V. Sagalovych 1999-8074 2012 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000906899 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. Sagalovych S. Dudnik V. Sagalovych Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| format |
Article |
| author |
A. Sagalovych S. Dudnik V. Sagalovych |
| author_facet |
A. Sagalovych S. Dudnik V. Sagalovych |
| author_sort |
A. Sagalovych |
| title |
Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_short |
Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_full |
Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_fullStr |
Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_full_unstemmed |
Deposition of the stoichiometric coatings by reactive magnetron sputtering |
| title_sort |
deposition of the stoichiometric coatings by reactive magnetron sputtering |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000906899 |
| work_keys_str_mv |
AT asagalovych depositionofthestoichiometriccoatingsbyreactivemagnetronsputtering AT sdudnik depositionofthestoichiometriccoatingsbyreactivemagnetronsputtering AT vsagalovych depositionofthestoichiometriccoatingsbyreactivemagnetronsputtering |
| first_indexed |
2025-07-22T13:33:11Z |
| last_indexed |
2025-07-22T13:33:11Z |
| _version_ |
1838354522051706880 |