Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods

Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods

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Bibliographische Detailangaben
Datum:	2012
Hauptverfasser:	A. D. Pogrebnjak, A. K.M. Mukhammed, M. N. Ivashchenko, N. N. Opanasjuk, I. V. Sudzhanskaja
Format:	Artikel
Sprache:	English
Veröffentlicht:	2012
Schriftenreihe:	Physical surface engineering
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000906915
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Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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