Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques
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| Date: | 2011 |
|---|---|
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
2011
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349824 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
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open-sciencenbuvgovua-961762024-04-17T17:25:29Z Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques V. V. Brus Z. D. Kovalyuk O. A. Parfenyuk N. D. Vakhnyak 1560-8034 2011 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349824 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics V. V. Brus Z. D. Kovalyuk O. A. Parfenyuk N. D. Vakhnyak Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques |
| format |
Article |
| author |
V. V. Brus Z. D. Kovalyuk O. A. Parfenyuk N. D. Vakhnyak |
| author_facet |
V. V. Brus Z. D. Kovalyuk O. A. Parfenyuk N. D. Vakhnyak |
| author_sort |
V. V. Brus |
| title |
Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques |
| title_short |
Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques |
| title_full |
Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques |
| title_fullStr |
Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques |
| title_full_unstemmed |
Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques |
| title_sort |
comparison of optical properties of tio2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349824 |
| work_keys_str_mv |
AT vvbrus comparisonofopticalpropertiesoftio2thinfilmspreparedbyreactivemagnetronsputteringandelectronbeamevaporationtechniques AT zdkovalyuk comparisonofopticalpropertiesoftio2thinfilmspreparedbyreactivemagnetronsputteringandelectronbeamevaporationtechniques AT oaparfenyuk comparisonofopticalpropertiesoftio2thinfilmspreparedbyreactivemagnetronsputteringandelectronbeamevaporationtechniques AT ndvakhnyak comparisonofopticalpropertiesoftio2thinfilmspreparedbyreactivemagnetronsputteringandelectronbeamevaporationtechniques |
| first_indexed |
2025-07-22T14:07:47Z |
| last_indexed |
2025-07-22T14:07:47Z |
| _version_ |
1838356759655219200 |