Дослiдження методами ядерного мiкроаналiзу поверхневих наношарiв структури золото–кремнiй
The Rutherford backscattering and particle-induced X-ray emission methods are used to study the surface layers in gold–silicon structures, the parameters of which govern the operational characteristics of electron devices constructed on their basis. The measurements are performed on a high-precision...
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| Datum: | 2018 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | English Ukrainian |
| Veröffentlicht: |
Publishing house "Academperiodika"
2018
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| Schlagworte: | |
| Online Zugang: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018296 |
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| Назва журналу: | Ukrainian Journal of Physics |