Вплив метастабільних атомів аргону і пилових частинок на плазму газового розряду
The model of a DC glow discharge with metastable argon atoms and dust particles based on the Boltzmann equation for the electron energy distribution function (EEDF), dust particle charging, and balance equation for metastable argon atoms is presented. The processes of direct and stepwise electron im...
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| Date: | 2022 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Publishing house "Academperiodika"
2022
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021424 |
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| Journal Title: | Ukrainian Journal of Physics |