Осадження металічних плівок на мікрочастинки у пастці ВЧ магнетронного розряду
The technique for a metal film deposition on spherical microparticles in an RF plasma trap is presented. Both the particle confinement and the electrode sputtering are performed by a single RF magnetron discharge. The samples of a coated spheres are obtained and examined. The technique allows confin...
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| Date: | 2022 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Publishing house "Academperiodika"
2022
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021437 |
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| Journal Title: | Ukrainian Journal of Physics |