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chemical etching chromium film 1 laser recording 1 mathematical modeling 1 microrelief structure 1 photoresist layer 1 sapphire substrates 1 лазерний запис 1 математичне моделювання 1 мікрорельєфна структура 1 плівка хрому 1 сапфірові підкладки 1 хімічне травлення 1 шар фоторезисту 1
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    Investigation of the process of microrelief structures formation in chromium films based on the method of chemical etching
    Investigation of the process of microrelief structures formation in chromium films based on the method of chemical etching
    by Панкратова, А. В., Крючин, А. А., Бородін, Ю. О., Беляк, Є. В., Пригун, О. В.
    Published 2021
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Data Recording, Storage & Processing 1
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Беляк, Є. В 1 Бородін, Ю. О 1 Крючин, А. А 1 Панкратова, А. В 1 Пригун, О. В 1
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