In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing

by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej
Published 2017

A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide

by Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev
Published 2013

Polished surface roughness of optoelectronic components made of monocrystalline materials

by Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov
Published 2016

Efficiency of polishing of anisotropic single-crystal materials for optoelectronics

by Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov
Published 2016

Polishing of opto-electronic equipment elements from single-crystal silicon carbide

by Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij
Published 2015