Diamond polishing of crystalline materials for optoelectronics

by Ju. D. Filatov
Published 2017

Surface roughness of optoelectronic components in mechanical polishing

by Ju. D. Filatov
Published 2018

Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components

by Ju. D. Filatov
Published 2018

Formation of flat surfaces of optoelectronic components in diamond polishing

by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov
Published 2017

In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing

by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej
Published 2017

A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide

by Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev
Published 2013

Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum

by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin
Published 2017

Polished surface roughness of optoelectronic components made of monocrystalline materials

by Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov
Published 2016

Efficiency of polishing of anisotropic single-crystal materials for optoelectronics

by Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov
Published 2016

Precision shaping flat surfaces details of optics and microelectronics when polishing

by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov
Published 2016

Polishing of opto-electronic equipment elements from single-crystal silicon carbide

by Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij
Published 2015

Studies of the oxidation stability, mechanical characteristics of materials based on MAX Phases of the Ti–AL–(C, N) systems, and of the possibility of their use as tool bonds and m...

by T. A. Prikhna, A. V. Starostina, D. Litskendorf, I. A. Petrusha, S. A. Ivakhnenko, A. I. Borimskij, Ju. D. Filatov, M. G. Loshak, M. A. Serga, V. N. Tkach, V. Z. Turkevich, V. B. Sverdun, S. A. Klimenko, D. V. Turkevich, C. N. Dub, T. V. Basjuk, M. V. Karpets, V. E. Moshchil, A. V. Kozyrev, V. V. Kovyljaev, G. D. Ilnitskaja, T. Kabjosh, P. Sharte
Published 2014