Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum

by Yu. D. Filatov, V. I. Sydorko, S. V. Kovalov, V. A. Kovalov, Ya. Yurchyshyn, M. A. Danylchenko, A. H. Vietrov
Published 2018

Influence of rheological properties of the disperse system on polishing indicators substrate from sitall

by Yu. D. Filatov, V. I. Sydorko, S. V. Sokhan, S. V. Kovalov, A. M. Panova, V. A. Kovalov, V. V. Harashchenko, A. H. Vietrov
Published 2019