Influence of secondary electron emission on the RF gas breakdown

by Dakhov, A.N., Dudin, S.V.
Published 2013

Actinometric study of oxygen dissociation in ICP source

by Dakhov, A.N., Dudin, S.V.
Published 2014

Conversion of carbon dioxide in low-pressure plasma

by Dudin, S.V., Dakhov, A.N.
Published 2018

Dependence of RF breakdown curve on electrode geometry in CCP reactor

by Dudin, S.V., Dakhov, A.N., Lisovskiy, V.A., Pletniov, V.M.
Published 2012

Forming a unipolar pulsed discharge in nitrogen

by Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N.
Published 2016

Formation stages of pulsed discharge in oxygen and carbon tetrafluoride

by Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.
Published 2016