Hard plasmachemical a-SiCN coatings

by O. K. Porada, A. O. Kozak, V. I. Ivashchenko, S. M. Dub, H. M. Tolmacheva
Published 2016

Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering

by A. O. Kozak, V. I. Ivashchenko, O. K. Porada, L. A. Ivashchenko, O. K. Synelnychenko, S. M. Dub, O. S. Lytvyn, I. I. Tymofieieva, H. M. Tolmacheva
Published 2015