Effect of dislocations in relaxed MBE SiGe layers on the electrical behavior of Si/SiGe heterostructures

von Horvath, Zs.J., Orlov, L.K., Ivina, N.L., Demidov, E.S., Vdovin, V.I., Adam, M., Szabo, I., Dozsa, L., Pashaev, E.M., Ivanov, Yu.M., Yakunin, S.N.
Veröffentlicht 2004