Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment

by Konakova, R.V., Kladko, V.P., Lytvyn, O.S., Okhrimenko, O.B., Konoplev, B.G., Svetlichnyi, A.M., Lissotschenko, V.N.
Published 2009