Optical Recording of Micro- and Nano- Relief Structures on Inorganic Resists Ge-Se

von Indutny, I. Z., Kryuchyn, A. A., Borodin, Yu. A., Danko, V. A., Lukanyuk, M. V., Minko, V. I., Shepelyavyi, P. E., Gera, E. V., Rubish, V. M.
Veröffentlicht 2013