Fabrication of silicon grating structures using interference lithography and chalcogenide inorganic photoresist

von Min’ko, V.I., Shepeliavyi, P.E., Indutnyy, I.Z., Litvin, O.S.
Veröffentlicht 2007

Effect of acetone vapor treatment on photoluminescence of porous nc-Si–SiOx nanostructures

von Indutnyi, I.Z., Michailovska, K.V., Min’ko, V.I., Shepeliavyi, P.E.
Veröffentlicht 2009

Recording of high efficiency diffraction gratings by He-Ne laser

von Min'ko, V.I., Shepeliavyi, P.E., Dan'ko, V.A., Romanenko, P.F., Litvin, O.S., Indutnyy, I.Z.
Veröffentlicht 2004

Effect of chemical and radiofrequency plasma treatment on photoluminescence of SiOx films

von Indutnyy, I.Z., Lysenko, V.S., Min'ko, V.I., Nazarov, A.N., Tkachenko, A.S., Shepeliavyi, P.E., Dan'ko, V.A., Maidanchuk, I.Yu.
Veröffentlicht 2006