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Omarov, A.О.
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Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆
by
Kalinichenko, A.I.
,
Omarov, A.О.
,
Strel’nitskij, V.E.
Published 2021
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Related Subjects
Physics of radiation and ion-plasma technologies