Digital identification of the emission spectrum lines of magnetron discharge

by Afanasіeva, I.A., Afanasiev, S.N., Bobkov, V.V., Gritsyna, V.V., Drozdov, D.R., Logachev, Yu.E., Skrypnyk, A.A., Shevchenko, D.I.
Published 2019

Digital processing of optical emission spectra of magnetron sputtering plasma system

by Afanasіeva, I.A., Afanasiev, S.N., Azarenkov, N.A., Bobkov, V.V., Gritsyna, V.V., Logachev, Yu.E., Okseniuk, I.I., Skrypnyk, A.A., Shevchenko, D.I., Chornous, V.M.
Published 2019