Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum

von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin
Veröffentlicht 2017

Precision shaping flat surfaces details of optics and microelectronics when polishing

von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov
Veröffentlicht 2016

Formation and localization of deposit from wear of polishing powder nanoparticles on treated surface during polishing of polymer optical materials

von Yu. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. Y. Boyarintsev, V. A. Kovalev, O. Y. Yurchyshyn
Veröffentlicht 2024