Optical Recording of Micro- and Nano- Relief Structures on Inorganic Resists Ge-Se

Optical Recording of Micro- and Nano- Relief Structures on Inorganic Resists Ge-Se

The results of experimental studies on recording of microrelief structures using a focused laser radiation with a wavelength of 405 nm to photoresist films of inorganic system Ge-Se have been presented. It is shown that the microrelief structures having depth of 100 nm can be obtained on the inorgan...

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Datum:	2013
Hauptverfasser:	Indutny, I. Z., Kryuchyn, A. A., Borodin, Yu. A., Danko, V. A., Lukanyuk, M. V., Minko, V. I., Shepelyavyi, P. E., Gera, E. V., Rubish, V. M.
Format:	Artikel
Sprache:	rus
Veröffentlicht:	Інститут проблем реєстрації інформації НАН України 2013
Schlagworte:	inorganic photo-resist optical recording micro-relief structure
Online Zugang:	http://drsp.ipri.kiev.ua/article/view/103416
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Data Recording, Storage & Processing

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Data Recording, Storage & Processing

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