Optical Recording of Micro- and Nano- Relief Structures on Inorganic Resists Ge-Se

Optical Recording of Micro- and Nano- Relief Structures on Inorganic Resists Ge-Se

The results of experimental studies on recording of microrelief structures using a focused laser radiation with a wavelength of 405 nm to photoresist films of inorganic system Ge-Se have been presented. It is shown that the microrelief structures having depth of 100 nm can be obtained on the inorgan...

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Datum:2013
Hauptverfasser: Indutny, I. Z., Kryuchyn, A. A., Borodin, Yu. A., Danko, V. A., Lukanyuk, M. V., Minko, V. I., Shepelyavyi, P. E., Gera, E. V., Rubish, V. M.
Format: Artikel
Sprache:rus
Veröffentlicht: Інститут проблем реєстрації інформації НАН України 2013
Schlagworte:
inorganic photo-resist
optical recording
micro-relief structure
Online Zugang:http://drsp.ipri.kiev.ua/article/view/103416
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Назва журналу:Data Recording, Storage & Processing

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Data Recording, Storage & Processing

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http://drsp.ipri.kiev.ua/article/view/103416

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