Ion implantation, ion-beam mixing during simultaneous ion implantation and metal deposition
This article present‘s researching results of ion implantation Ta in Cu monocrystal with different plane. Also the article demonstrates the processes of ion mixing and deposition of ions Ta+ and Cu+ on polycrystalline Al substrate. Effect of crystalline plane line was found. At the same implantati...
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| Date: | 2013 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Науковий фізико-технологічний центр МОН та НАН України
2013
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| Series: | Физическая инженерия поверхности |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/100596 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Ion implantation, ion-beam mixing during simultaneous ion implantation and metal deposition / M.A. Lisovenko, K.O. Belovol, O.V. Kyrychenko, V.T. Shablya, J. Kassi, B.P. Gritsenko, V.V. Burkovska // Физическая инженерия поверхности. — 2013. — Т. 11, № 4. — С. 406–411. — Бібліогр.: 6 назв. — англ. |