Kinetic simulation of low pressure RF discharge in nonuniform axisymmetric magnetic field
An implicit 2D3V PIC/MCC code has been developed for the kinetic simulation of low pressure RF discharges. The code uses coupled particle-in-cell method (PIC) for calculation collisionless dynamic of the plasma particles and Monte-Carlo method (MCC) for taking in account the particle collisions. For...
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| Date: | 2012 |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2012
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/109107 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Kinetic simulation of low pressure RF discharge in nonuniform axisymmetric magnetic field / V.V. Olshansky // Вопросы атомной науки и техники. — 2012. — № 6. — С. 77-80. — Бібліогр.: 9 назв. — англ. |